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TS150-THz-Manual-Probe-System-DS



MPI        TS150-THZ | 150 mm Manual Probe System

Industry‘s first explicitly designed probe system for accurate measurements at mm-wave and sub-mm wave (THz) frequency range

FEATURES / BENEFITS



Universal Use

       img1Seamless integration of any banded or broad- band* frequency extenders for a variety of applications


Ergonomic Design

       Unique puck controlled air bearing stage for quick single-handed operation

       Rigid and large platen accommodates large area MicroPositioners, holding mmw extenders

       Highly repeatable platen lift design with three discrete positions for contact, separation, and loading


Upgradability

       Available with various chuck options, PCB holder and a wide range of accessories such as DC/RF/THz MicroPositioners, Optics, and microscopes to support various application requirements




















Please click on the picture for direct link to MPI home page





SPECIFICATIONS

Chuck XY Stage (Standard)

Total travel range        180 x 300 mm (7.1 x 11.8 in)


Fine-travel range        25 x 25 mm fine micrometer control

Fine-travel resolution        < 1.0 µm (0.04 mils) @ 500 µm/rev

Planarity        < 10 µm

Theta travel (standard)        360°

Theta travel (fine)        ± 5.0°

Theta resolution        7.5 x 10-3 gradient

Movement        Puck controlled air bearing stage



Chuck Z Stage

Travel range        10 mm (0.4 in)

Fine-travel resolution        < 1.0 µm (0.04 mils) @ 500 µm/rev, with digital indicator



Manual Microscope Stage (Linear)

Movement range        50 x 50 mm (2 x 2 in)

Resolution        < 5µm (0.2 mils)

Scope lift        Manual, tilt-back or vertical (depending on microscope type)

Movement        Independently controlled X and Y movement with locking screws





PROBE PLATEN

Specifications

Design        For unsurpassed stability: low profile, four pole support


Material        Nickel plated steel

Dimension        Large area platen, see drawing

Chuck to platen height        min. 20 mm higher

Max. No of MicroPositioners        2x mmW E/W + 2x RF N/S and 4x DC or 2x mmW E/W + 8x DC

Platen lift control        3 positions - contact (0), separation (300 µm), and loading (3 mm)

Separation repeatability        < 1 µm (0.04 mils) by „automated“ control

mmW MicroPositioner mounting        Bolt down

RF MicroPositioner mounting        Magnetic with guided rail

115

95

DC MicroPositioner mounting        Magnetic


















Probe Platen design for DC, RF and THz MicroPositioners




NON-THERMAL CHUCKS

RF Wafer Chuck

Connectivity        Coax BNC (f)

Material        Nickel Plated Aluminium (flat with 0.5 mm holes)

Diameter        160 mm with 2 integrated AUX areas

Chuck surface        Planar with 0.5 mm diameter holes in centric sections Vacuum holes sections (diameter)        3, 27, 45, 69, 93, 117, 141 mm

Vacuum actuation        Manual switch between Center (4 holes), 50, 100, 150 mm (2, 4, 6 in)

Supported DUT sizes        Single DUTs down to 4 x 4 mm size or wafers 50 mm (2 in) thru 150 mm

(6 in)*

Surface planarity        ≤± 5 µm

Rigidity        < 15 µm / 10 N @edge

Electrical Specification

Operation voltage        In accordance with EC 61010, certificates for higher voltages available

upon request

Isolation        > 2 


*Single DUT testing requires higher vacuum conditions dependent upon testing application.


mmW Wafer Chuck

Connectivity        N/A

Diameter        160 mm with 2 integrated AUX areas

Material        Ceramic with high tempearuture conductivity, RF absorbing material for accurate measurements at mm-wave and sub-mm wave (THz) fre- quency range

Chuck surface        Planar with 0.5 mm diameter holes in centric sections Vacuum holes sections (diameter)        3, 27, 45, 69, 93, 117, 141 mm

Vacuum actuation        Manual switch between Center (4 holes), 50, 100, 150 mm (2, 4, 6 in)

Supported DUT sizes        Single DUTs down to 4 x 4 mm size or wafers 50 mm (2 in) thru 150 mm

(6 in)*

Surface planarity        ≤± 5 µm

Rigidity        < 15 µm / 10 N @edge

*Single DUT testing requires higher vacuum conditions dependent upon testing application.


Auxiliary Chuck

Quantity        2 AUX chucks

Position        Integrated to rear side of main chuck

Substrate size (W x L)        Max. 25 x 25 mm (1 x 1 in)

Material        Ceramic, RF absorbing material for accurate calibration

Surface planarity        ≤± 5 µm

Vacuum control        Controlled independently, separate from chucks



img2   MPI auxiliary chucks made by ceramic



Specifications of MPI ERS Integrated Technology


35 °C to 150 °C

20 °C to 200 °C

20 °C to 200 °C

Connectivity

Coax BNC (f)

Coax BNC (f)

Kelvin Triax (f)


Resistance heater

Temperature control method        Cooling air /

Cooling air / Resistance heater

Cooling air / Resistance heater


Coolant        Air (user supplied)        Air (user supplied)        Air (user supplied)


Smallest temperature selection step

Chuck temperature display resolution

display operation


Temperature stability

±0.5 °C

±0.08 °C

±0.08 °C

Temperature accuracy

±1 °C

0.1 °C

0.1 °C

Control method

DC/PID

Low noise DC/PID

Low noise DC/PID

Interfaces

RS232C

RS232C

RS232C

Chuck surface plating        Nickel plated with        Nickel plated with        Nickel plated with

pinhole surface        pinhole surface        pinhole surface

Temperature sensor        Pt100 1/3DIN

Pt100 1/3DIN,

4-line wired

Pt100 1/3DIN,

4-line wired

Temperature uniformity        < ±1 °C

< ±0.5 °C

< ±0.5 °C

Surface flatness and        < ±15 µm

< ±10 µm

< ±10 µm

Heating and cooling rates        35 to 150 °C < 10 min

20 to 200°C < 12 mins

20 to 200 °C < 20 min

150 to 35 °C < 15 min

200 to 20°C < 15 mins

200 to 20 °C < 20 min


External touchscreen

0.1 °C        0.1 °C        0.1 °C


0.1 °C        0.01 °C        0.01 °C


N/A        Yes        Yes














> 0.5 T Ω at 25 °C

base parallelism




Electrical isolation Coax BNC (f)

> 10 T Ω at 25 °C

> 300 G Ω at 200 °C


N/A




Capacitance        < 750 pF        < 900 pF        N/A


TYPICAL TRANSITION TIME




250

AC3 150 mm +20°C to +200°C


350

AC3 150 mm +20°C to +300°C



temperature [°C]

200


150


100


50


0














0        5        10 15 20 25 30 35 40 45

time [min]


300


temperature [°C]

250


200


150


100


50


0

0















5 10 15 20 25 30 35 40 45 50 55 60

time [min]


img3

210

Thermal Chuck Electrical Supply

img4Electrical Supply        Hot only thermal chucks Electrical primary connection        100 to 240 VAC auto switch Frequency        50 Hz / 60 Hz

Operating pressure        6.0 bar (0.6 MPa, 87 psi) at specified flow rate

Compressed Air Supply

CDA dew point        ≤ 0 °C

img5


Controller Dimensions / Power and Air Consumption

System Type

W x D x H (mm)

Weight (kg)

Power Cons. (VA)

max. Air Flow (l/min)

35 to 150 °C - Coax BNC (f)

300 x 265 x 135

10

500

150

20 to 200 °C - Coax BNC (f)

300 x 360 x 135

12

700

200

20 to 200 °C - Kelvin Triax (f)

300 x 360 x 135

12

700

200


img6General Probe System

Power        100-240 V AC 50/60 Hz for optical accessories* only

img7Vacuum        -0.9 bar

Compressed air        6.0 bar

*e.g. microscope illumination, CCD cameras, monitors.


img8WARRANTY

       Warranty*: 12 months

       Extended service contract: contact MPI Corporation for more information

*See MPI Corporation‘s Terms and Conditions of Sale for more details.


img9PHYSICAL DIMENSIONS


Station Platform with Bridge*

img10Dimensions (W x D x H)        670 x 680 x 770 mm (26.4 x 26.8 x 30.3 in)

Weight        ~120 kg (265 lb.)

img11

770

680

765

*Station accessories, such as different microscopes, cameras, or laser cutters, may change the total height.




Vibration Isolation Table

Standard        Advanced


img12

Dimensions (W x D x H)

900 x 800 x 835 mm

(35.4 x 31.5 x 32.9 in)

900 x 800 x 830 mm

(35.4 x 31.5 x 32.7 in)


img13Feature        Adjustable air damping system                Automatic load leveling Keyboard / Mouse Tray Included                Yes

img14Front Protection Bar        Yes

Castors Included        Yes

img15Shelves Included        Upper and Lower

Accessories Accepted        Monitor Stand(s) and Instrument Shelf

Weight        Approx. 210 kg ( 463 lb.)        Approx. 210 kg ( 463 lb.)

img16




STD 835  5

ADV 830  5

750

800

800
































img17MPI Global Presence



Direct contact:

Asia region:                ast-asia@mpi-corporation.com EMEA region:        ast-europe@mpi-corporation.com America region: ast-americas@mpi-corporation.com

MPI global presence: for your local support, please find the right contact here:

www.mpi-corporation.com/ast/support/local-support-worldwide

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