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Optic-Selection-Guide



MPI        Optical        Solutions

MPI is working closely with leading optical suppliers to develop and optimize dedicated microscope solutions. This provides leading edge on-wafer observation and navigation. The selected optics are a perfect ft to the specifc requirements of accurate probe placement on DC/CV, RF and mmW pads.

Single tube solution provides a large working distance at high magnifcation. Small form factors are ideal for RF, mmW and load-pull applications due to space restrictions inherent with the integration of test heads/tuners requiring shortest distance to DUT.

MPI is also ofers state of the art high-power microscopes such as Motic PSM-1000 and Mitutoyo FS70 confgured to address internal-node probing or Failure Analysis application requirements.

All optics include TV ports for being used with a number of 1080p HDMI cameras. Images are displayed on the monitor without additional computer requirements:

       Image can be captured directly onto the built-in mini SD card

       Remote control and/or direct camera buttons for various settings

       All required cables are included




img1MPI iMAG®

MPI iMAG® Series are unique high resolution digital imaging systems designed especially for MPI manual and automated probe systems by providing an unsurpassed color image quality and ultra-fast color frame rate video speed for an optimal and very convenient wafer na- vigation.

The dedicated optical design guarantees that one camera pixel is al- ways smaller than the optical resolving power of the used objective lenses, so that the 40x zoom range is limited fnally by the perfor- mance of the M Plan APO optics only.

The large 1.1 inch, 6.55MP quadratic sensor delivers the maximum of optically possible feld of view (FOV) without any edge shadow efects.


iMAG® and iMAG®-Pro microscopes are equipped with objective lens detection system, so that SENTIO® will recognize it automatically as soon is placed in. The sofware will memorize the corres- ponding objective data, and all automated features can be performed right away without the need of additional pixel-to-micrometer calibration.

The operation of MPI automated probe systems using iMAG® digital imaging systems are identifed by intuitive, easy, safety and high productivity operation.


img2Main Features:

       2560 x 2560 pixel color video image (6.55MP)

       ≥ 20 fps real color frame rate

       Global shutter camera

       Large FOV: 3.94mm FOV @ 5x

       Lean design, no cables around, compatible with MPI ShielDCap™

       Easy lens exchange (front slider) with automatic lens detection

       Compatible with any M Plan lenses        Automatic objective lens detection system





General Specifcation


Resolution

Frame Rate

Z-Drive

Range

Resolution

MPI iMAG® Pro



Yes

2 mm

0.2 µm

  MPI iMAG®        

2560 x 2560

≥ 20 fps

No

N/A

N/A

MPI iMAG® M*



No

N/A

N/A


Microscope        Video


Color Video


Lens Mount






* For MPI manual TSXXX probe systems


Optical Specifcation


Lens(1)

Resolution(2) [µm]


Distance [mm]

of Focus(1) [± µm]

H

V

2x

5.0 µm

0.055

34

90.91

9850

9850

5x

2.0 µm

0.14

34

14.03

3940

3940

10x

1.0 µm

0.28

33.5

3.51

1970

1970

20x

0.7 µm

0.42

20

1.56

980

980

50x

0.5 µm

0.55

13

0.91

390

390


Objective

Optical

N.A.        Working

Depth

Max. FOV [µm]









(1)       5x lens is part of standard delivery

(2)       Optical resolution and focal depth based on reference wavelength of 550 nm. The optical resolution is identical over the entire FOV (!)

img3


iMAG®-M  the digital microscope for MPI

manual probe systems

MPI iMAG® embedded within SENTIO® Sofware Suite



Microscope / Movement Matrix


iMAG® M        N/A        N/A        N/A        Yes

iMAG®        Yes        Yes        N/A        N/A

iMAG® Pro        Yes        Yes        N/A        N/A

AMZ12-LM        Yes        Yes        N/R*        N/A

MZ12        N/R*        N/R*        Yes        N/A Z10/EZ10/SZ10                N/A                N/A        Yes        N/A

*Not Recommended




img4MPI Automated MegaZoom AMZ12

       The non-plus-mega, single tube microscope with 12x programmable zoom

       Unique combination of large feld of view and extremely high magnifcation

       Max. 46.2 mm working distance for stress-free probe replacement, cable and diferent RF probe reconfguration

       Up to 1.68 µm optical resolution for excellent small pads probing and accurate

placement on calibration standards

       TV port – standard c-mount

       35 mm focus block with fne and fast movement, 90° tilting

       Dedicated for all DC/CV, RF, mmW and load pull measurements


Optical  zoom range        0.58x - 7.0x (programmable)        1.25x - 15.0x (programmable)

Objective Lens        7x        15x

WD        40.6 mm        46.2 mm

Resolution        20.6 - 2.9 µm        11.18 - 1.68 µm


N.A.        0.016 - 0.113        0.03 - 0.2

DOF        ± 1074.22 - ± 21.54 µm        ±305.56 - ±6.88 µm

FOV (H x V) w. SENTIO®        12.19 x 9.14 - 1.01 x 0.76 mm        5.66 x 4.24 - 0.47 x 0.35 mm

LED coaxial illumination        5 W


Power supply

110 V / 220 V, 8 W, CE,

Dimensions (W x D x H)        45 x 113 x 225 mm        45 x 113 x 208 mm

dimmable and On/Of programmable control

Weight        Approx. 1200 g


img5

MPI TS2000-SE with AMZ12 microscope


img6

Objective Lens

7x


15x

Optical zoom range

0.58x - 7.0x


1.25x - 15.0x

WD

40.6 mm


46.2 mm

Optical resolving power

20.6 - 2.9 µm


11.18 - 1.68 µm

DOF

± 1074.22 - ± 21.54 µm


±305.56 - ±6.88 µm

N.A.

0.016 - 0.113


0.03 - 0.2

FOV (H x V) w. ST-HD2MP

9.38 x 5.33 - 0.78 x 0.44 mm


4.35 x 2.47 mm - 0.36 x 0.21 mm

FOV (H x V) w. MPI 1080

9.10 x 5.12 - 0.75 x 0.42 mm


4.22 x 2.38 - 0.35 x 0.20 mm

FOV (H x V) w. MOTICAM 1080

9.66 x 5.43 - 0.80 x 0.45 mm


4.48 x 2.52 - 0.37 x 0.21 mm

FOV (H x V) w. SENTIO®

12.19 x 9.14 - 1.01 x 0.76 mm


5.66 x 4.24 - 0.47 x 0.35 mm

LED coaxial illumination


5 W


Power supply        110 V / 220 V, 8 W, CE, manually dimmable and On/Of remote control

Weight        Approx. 1000 g

Dimensions (W x D x H)        45 x 80 x 225 mm        45 x 80 x 208 mm

MPI SuperZoom SZ10


       img710x zoom single tube microscope

       Incredible 95 mm working distance for stress-free probe replacement and test heads/tuner integration

       2.5 µm optical resolution for small pads probing and accurate placement on

calibration standards

       TV port – standard c-mount

       35 mm focus block with fne and fast movement, 90° tilting

       Dedicated for all DC/CV, RF, mmW and load pull measurements

Optical zoom range        1.0x - 10.0x


WD        95 mm

Optical resolving power        8.8 - 2.5 µm


N.A.        0.038 - 0.136

DOF        ± 190.44 - ± 14.87 µm

FOV (H x V) w. ST-HD2MP        5.44 x 3.09 - 0.54 x 0.31 mm

FOV (H x V) w. MPI 1080        5.28 x 2.97 - 0.53 x 0.30 mm


FOV (H x V) w. SENTIO®        7.07 x 5.30 - 0.71 x 0.53 mm

FOV (H x V) w. MOTICAM 1080        5.6 x 3.15 - 0.56 x 0.32 mm

LED coaxial illumination        5 W

Power supply        110 V / 220 V, 8 W, CE, manually dimmable


Weight        Approx. 940 g

Dimensions (W x D x H)        46 x 85 x 300 mm


       Dedicated for all RF, mmW and load pull measurements

Trinocular head        Widefeld trinocular tube, 20° optical observation angle


Eyepiece        WF 20x, incl. collapsible rubber eye-guards

Optical pass ratio        Eyepiece : Camera C-mount = 0% : 100% or 100% : 0%


IPD (inter-pupillary distance)        Adjustable range from 55  70 mm

Optical magnifcation (eyepiece)        17x - 170x

Optical zoom range        0.85x - 8.5x (10:1)

Aperture diaphragm        Adjustable feld of depth and contrast, in 5 steps


Optical resolving power        2.0 µm

WD        90 mm

FOV (D)        10.6 – 1.06 mm (20x eyepiece)

FOV (H x V) w. ST-HD2MP        6.40 x 3.64  0.64 x 0.36 mm


FOV (H x V) w. MOTICAM 1080        6.59 x 3.71  0.66 x 0.37 mm

FOV (H x V) w. MPI 1080        6.21 x 3.49 - 0.62 x 0.35 mm

FOV (H x V) w. SENTIO®        8.32 x 6.24 - 0.83 x 0.62 mm

TV port (C-mount)        1x


LED coaxial illumination        5 W

LED ring illumination (option)        24 pcs., 53 mm outer diameter


Power supply        100 - 240 V, 7.2 W, CE

Dimensions (W x D x H)        126  145 (eyepiece), 60 / 38 (tube / lens) x 195 x 305 mm


Weight        Approx. 2.5 kg


img8

MPI TS150-THZ with EZ10 microscope


       img9Single tube microscope with 10x zoom

       Excellent optical resolving power down to 2µm

       90 mm working distance for stress-free probe replacement, cable and diferent RF probe reconfguration

       img10Optional ring-light illumination (in addition to the coaxial light) for outstan- ding visibility on diferent materials, such as calibration standards and dif- ferent wafer pads

       

Optical zoom range        0.85x - 8.5x (10:1)

Dedicated for all RF, mmW and load pull measurements

Aperture diaphragm        Adjustable feld of depth and contrast, in 5 steps

WD        90 mm


FOV (D)        10.6 – 1.06 mm (20x eyepiece)

Optical resolving power        2.0 µm

FOV (H x V) w. ST-HD2MP        6.40 x 3.64  0.64 x 0.36 mm

FOV (H x V) w. MPI 1080        6.21 x 3.49 - 0.62 x 0.35 mm


FOV (H x V) w. SENTIO®        8.32 x 6.24 - 0.83 x 0.62 mm

FOV (H x V) w. MOTICAM 1080        6.59 x 3.71  0.66 x 0.37 mm

TV port (C-mount)        1x

LED coaxial illumination        5 W


LED ring illumination (option)        24 pcs., 53 mm outer diameter

Power supply        100 - 240 V, 7.2 W, CE


Dimensions (W x D x H)        60 / 38 x 195 x 305 mm

Weight        Approx. 2.0 kg



img11MPI Stereo Microscope ST45

       Entry level stereo microscope

       25x eyepiece for max. magnifcation

       TV port  standard c-mount

       50 mm focus block (for pivot or tilt mount)

       Dedicated for DC/CV measurements

       A TV port for higher magnifcation or other optics is recommended for RF

Trinocular head        45° inclined

measurements

Zoom objective lens        0.67x - 4.5x (6.7:1)

Eyepiece        25x


Optical magnifcation        16.8x - 112.5x

Auxiliary lens        1.0x

FOV (D)        13.4 - 2.0 mm

WD        100 mm


LED ring illumination        72 pcs., 4 independent sectors selectable

TV port (C-mount)        1x

Power supply        100 - 240 V, 7.2 W, CE

Dimensions (W x D x H)        45 x 85.5 x 269 mm


Weight        Approx. 550 g



img12ST-HD2MP

       Small form factor 1080p HDMI camera

       No requirement of a computer for standard operation

       2 m HDMI cable included

       Wired control for white balance and other settings

MPI1080

       img13Versatile 1080p HDMI camera

       Does not require a computer for standard operation

       Mouse control and GUI w/o. computer

       Image can be captured directly onto the build-in mini SD card at 2.0 MP, 8 MB included.

       Ideal for documentation on the MPI manual probe systems series

       Remote control over the mouse

       All cables and Bluetooth mouse included

Moticam1080

       Versatile 1080p HDMI camera

       img14Does not require a computer for standard operation

       Mouse control and GUI w/o. computer

       Image can be captured directly onto the build-in mini SD card at 2.0 MP

       USB 2.0 interface allows using the provided sofware: includes measurement, annotation and reporting tool

       Ideal for documentation on the MPI manual probe systems series by

using Motic Image Plus for PC & Mac

       Remote control over the mouse and direct camera buttons for various

       All cables and Bluetooth mouse included

MPI Product Name

ST-HD2MP

MPI CCD-1080


MOTICAM 1080

Sensor type

CMOS

CMOS


CMOS

Sensor size

1/2.8 in

1/2.8 in


1/2.8 in

Active resolution (Total pixel)

1920 x 1080 (2 MP)

1920 x 1080 (2 MP)


1920 x 1080 (2 MP)

Pixel size

2.8 x 2.8 µm

2.75 x 2.75 µm


2.2 x 2.2 µm

USB

N/A


1080P


Sofware

N/A

N/A


Motic Image Plus

SD card        Capture mode (included)        Recording mode

N/A

N/A

1080P

1080P


N/A

N/A

Frame rates HDMI screen        Capture mode

Recording mode

60 fps        60 fps

N/A        1080P

N/A        1080P

White balance

Automatic

Automatic, manual

Remote control

Wired RC-HD133

Over the mouse (Bluetooth mouse included)

Simultaneous USB & HDMI output

N/A

Yes

Screen control & operation

N/A

Yes, mouse control with screen UI

Power supply        DC 12V AC Adapter,        DC 12V AC Adapter, 110V/220V, CE, FCC, UL, PSE 110V/220V, CE

Dimension (W x D x H)

40 x 40x 51.1 mm

84 x 79 x 69 mm

80 x 88.8 x 61.8 mm

Weight

Approx. 120 g

Approx. 335 g

Approx. 275 g


settings
















live show



ST-HD2MP        MPI-1080        MOTICAM 1080        SENTIO®-3MP



SZ10


5.44 x 3.09 mm        5.28 x 2.97 mm        5.6 x 3.15 mm        7.07 x 5.30 mm




AMZ12        N/A        N/A        N/A



7x: 12.19 x 9.14 mm

15x: 5.66 x 4.24 mm



iMAG®


2x        9.85 x 9.85 mm

5x        3.94 x 3.94 mm


2x

5x


10x





10x        1.97 x 1.97 mm

20x        0.98 x 0.98 mm

2

50x        0.39 x 0.39 mm










See MPI Corporation‘s Terms and Conditions of Sale for more details.



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img15

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