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MPI-TS200-HP-Manual-Probe-System-Data-Sheet



MPI        TS200-HP | 200 mm Manual Probe System For accurate and reliable High Power measurements

FEATURES / BENEFITS

Dedicated designed for High Voltage and High Current application

       img1On wafer high power device measurement up to 10kV/600A

       Gold plated chuck surface for minimum contact resis- tance and vacuum holes optimized for thin wafer handling down to 50 µm

       Taiko wafer chuck option

       Dedicated high voltage and high current probes

       Anti-arcing solutions


MPI ShielDEnvironment™ for Accurate Measurements

       Design for Advanced EMI / RFI / Light-Tight Shielding

       Platen ArcShield™

       fA low-leakage capabilities

       Ready for temperature range -60 °C to 300 °C


Ergonomic Design and Safety

       Unique puck controlled air bearing stage for quick single- handed operation

       Regulatory approved safety interlocked light curtain integrated with vibration isolation table to protect users

       Available with various chuck options and wide range of

accessories such as MicroPositioners, microscopes

SPECIFICATIONS

Chuck XY Stage (Standard)

Travel range        225 x 260 mm (8.9 x 10.2 in)


Fine-travel range        25 x 25 mm fine micrometer control

Fine-travel resolution        < 1.0 µm (0.04 mils) @ 500 µm/rev

Planarity        < 10 µm

Theta travel (standard)        360°

Theta travel (fine)        ± 5.0°

Theta resolution        7.5 x 10-3 gradient

Movement        Puck controlled air bearing stage



Chuck Z Stage

Travel range        5 mm (0.2 in)

Fine-travel resolution        < 1.0 µm (0.04 mils) @ 500 µm/rev

Load stroke        20 mm, pneumatically


Manual Microscope Stage (Linear)

Movement range        50 x 50 mm (2 x 2 in)

Resolution        < 5 µm (0.2 mils)

Scope lift        Manual, tilt-back or vertical (depending on microscope type)

Movement        Independently controlled X and Y movement with locking screws



475



PROBE PLATEN


Specifications

Material        Nickel plated steel

Dimension        See drawing

Chuck to ShielDGuard height        Min. 5 mm

Max. No of MicroPositioners        8x DC or 4x DC + 2x RF or 2x DC + 4x RF or 4x DC + 4x RF Setup Platen lift control        3 positions - contact (0), separation (300 µm), and loading (3 mm) Separation repeatability        < 1 µm (0.04 mils) by “automated“ control

RF MicroPositioner mounting        Magnetic with guided rail

300 °C thermal isolation        Depending on chuck configuration

DC MicroPositioner mounting        Magnetic



















250

Universal probe platen design for up to 8 DC MicroPositioners


PLATEN LIFT WITH Probe Hover Control™

MPI Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.

img2img3img4img5img6





ShielDEnvironment™

MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light- tight shielded test environment for ultra-low noise, low capacitance measurements.

MPI ShielDEnvironment™ allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configu- rations. MPI ShielDCap™ provides easy reconfiguration of measurement setup as well as EMI/noise shielding

- which make great difference in simplifying day to day operations.


ShielDEnvironment™ Electrical Specifications*

EMI shielding        > 30 dB (typical) @ 1 kHz to 1 MHz

Light attenuation        ≥ 130 dB

Spectral noise floor        ≤ -180 dBVrms/rtHz (≤ 1 MHz)

System AC noise        ≤ 5 mVp-p (≤ 1 GHz)


*Including 4 MicroPositioners.


img7img8


img9HIGH POWER PROBE ACCESSORIES


High Voltage Probe (HVP)

Low leakage probes specially designed to withstand high voltage up to 10 kV (coaxial) and 3 kV (triaxial). Choice of various connectors options such as Keysight Triax/UHV, Keithley Triax/UHV, SHV or Banana.




img10High Current Probe (HCP)

High performance probes specially designed for on wa- fer measurement of high current up to 200 A (pulse). MPI multi-fingers high current probes are single piece consturction to efficiently handle high current and pro- vide low contact resistance.



img11Ultra High Power Probe (UHP)

Designed for Ultra high voltage and current on wafer measurement up to 10 kV/600 A (pulse). MPI replaceable multi-fingers probes tips and probe arms are design for low contact resistance for ultra-high current measure- ment and to support ultra-high voltage of up to 10 KV, without having to change probes for high voltage and current application.



High current probes        High voltage probes


3 fingers

5 fingers

7 fingers

PA-HVT

PA-HVC

PA-HVC-10KV

Max current

40 A

65 A

100 A

2 A

2 A

2 A

Max voltage

500 V

500 V

500 V

3,000 V

5,000 V

10,000 V


banana[3] plug

Residual resis- tance (Typical)

 5          3          1         --        --        --



Leakage @ max. V        --        --        --         1 pA         600 pA        > 35 



Connector options

Banana[3] plug or BNC[4]        HV triaxial[2]        SHV        10 KV UHV or


Replaceable tip

Yes

Yes

Yes

Yes

Yes

Yes

Probe pitch[1]

350 µm (Std)

350 µm (Std)

350 µm (Std)

Single needle

Single needle

Single needle

[1]Configurable [2]Keysight or Keithley

[3]Banana: 100 A max, 1 ms max PW, 1% max PLC

[4]BNC: 40 A max, 1 ms max PW, 1% Max PLC


ULTRA HIGH POWER PROBES - SELECTION GUIDE



1 finger

4 fingers

6 fingers

8 fingers

12 fingers

Max current*

20 A

80 A

120 A

160 A

250 A

Max voltage

10 KV

10 KV

10 KV

10 KV

10 KV

Residual resistance (Typical)

≤ 5 mΩ

≤ 3 mΩ

≤ 1 mΩ

≤ 1 mΩ

≤ 1 mΩ

Connector options

Banana

Banana

Banana

Banana

Banana

Replaceable tip

Yes

Yes

Yes

Yes

Yes

Probe tip width

250 μm

250 μm

250 μm

250 μm

250 μm

Probe pitch

--

650 μm

650 μm

650 μm

650 μm

*1 ms Max PW, 0.4% max PLC


HIGH POWER PROBE CARDS


Max current        250 A

Max voltage        10 KV

Max pressure        8 bar

Max chamber diameter        25 mm

Max probe pin needles        20

Connector type        Keysight HV, Keithley HV, SHV, BNC, Banana, M HV

Probe pin needle diameter        5-25 μm (customizable)

Air pressure requirement        CDA up to 8 bar



High Power Chucks

200 mm

Connectivity 1        10 kV Coaxial (Banana or SHV)

Connectivity 2        Kelvin Triax (f), 3 kV or 10 kV Coaxial

Diameter        210 mm with 2 integrated AUX areas

Material

Gold plated aluminum

(flat with 100 µm holes)

Chuck surface        Planar with 0.5 mm diameter holes in centric sections

Vacuum actuation

Vacuum holes selection (diameter)        3, 27, 45, 69, 93, 117, 141, 164, 194 mm Manual switch between Center

(4 holes), 100, 150, 200 mm (4, 6, 8 in)

Surface planarity        ≤± 5 µm

Supported DUT sizes        Single DUTs down to 4 x 4 mm size or wafers 100 mm (4 in) thru 200 mm (8 in)*

Rigidity        < 15 µm / 10 N @edge


*Single DUT testing requires higher vacuum conditions dependent upon testing application.


Electrical Specification (Coax)

Operation voltage        In accordance with EC 61010, certificates for higher voltages available

upon request

Isolation        > 2 



Electrical Specification (Triax)



Standard Chuck (10 V)

High Power Chuck (10 V)

Chuck isolation

> 100 GΩ

> 30 TΩ

Force to guard

> 100 GΩ

> 30 TΩ

Guard to shield

> 10 GΩ

> 500 GΩ

Force to shield

> 50 GΩ

> 100 GΩ


Electrical Specification (High Power - Triax)

Chuck isolation        > 30 

Force to guard        > 30 

Guard to shield        > 500 

Force to shield        > 100 





img12img13


MPI Non-thermal Triaxial High Power Chuck with gold plated surface for low contact resistance

MPI 10 kV Triaxial Connector used for Kelvin chuck connection




HIGH POWER THERMAL CHUCKS

Specifications of MPI ERS Integrated Technology

Temperature Range        20 to 200 °C        20 to 300 °C


Connectivity

Kelvin Triax (f), 3 kV or 10 kV Coaxial

Kelvin Triax (f), 3 kV or 10 kV Coaxial


Temperature control method

Cooling air / Resistance heater

Cooling air / Resistance heater


Coolant        Air (user supplied)        Air (user supplied)


Smallest temperature selection step

Chuck temperature display resolution

display operation


Temperature stability

±0.08 °C

±0.08 °C

Temperature accuracy

0.1 °C

0.1 °C

Control method

Low noise DC/PID

Low noise DC/PID

Interfaces

RS232C

RS232C

Chuck surface plating        Gold plated with        Gold plated with

pinhole surface        pinhole surface


External touchscreen

0.1 °C        0.1 °C


0.01 °C        0.01 °C


Yes        Yes










4-line wired

Temperature sensor        Pt100 1/3DIN,


Pt100 1/3DIN,

4-line wired





Surface flatness and

base parallelism

< ±10 μm at ≤ 200 °C

< ±15 μm at > 200 °C


< ±10 µm

Heating rates        20 to 200 °C < 30 min        20 to 300 °C < 40 min

Cooling rates*        200 to 20 °C < 30 min        300 to 20 °C < 40 min


Maximum voltage between chuck top and GND

Leakage @ 10 V Kelvin Triax (f)

10 kV DC        10 kV DC



-60°C, -40°C and -10°C

--

--

25°C

< 15 fA

< 15 fA

200°C

< 30 fA

< 30 fA

300°C

--

< 50 fA

Leakage @ 3000 V Kelvin Triax (f)

-60°C, -40°C and -10°C

--

--

25°C

< 5 pA

< 5 pA

200°C

< 10 pA

< 10 pA

300°C

--

< 15 pA

Leakage @ 10 kV Coax UHV/SHV (f)

-60°C, -40°C and -10°C

--

--

25°C

< 6 nA

< 6 nA

200°C

< 6 nA

< 6 nA

300°C

--

< 6 nA




*       All data are relevant for chucks in ECO mode.




Specifications of MPI ERS Integrated Technology

Temperature Range        -10 to 200 °C/300 °C        -40 to 200 °C/300 °C        -60 to 200 °C/300 °C


Connectivity

Kelvin Triax (f), 3 kV or 10 kV Coaxial

Kelvin Triax (f), 3 kV or 10 kV Coaxial

Kelvin Triax (f), 3 kV or 10 kV Coaxial


Temperature control method

Cooling air / Resistance heater

Cooling air / Resistance heater

Cooling air / Resistance heater


Coolant        Air (user supplied)        Air (user supplied)        Air (user supplied)


Smallest temperature selection step

Chuck temperature display resolution

display operation


Temperature stability

±0.08 °C

±0.08 °C

±0.08 °C

Temperature accuracy

0.1 °C

0.1 °C

0.1 °C

Control method

Low noise DC/PID

Low noise DC/PID

Low noise DC/PID

Interfaces

RS232C

RS232C

RS232C

Chuck surface plating        Gold plated with        Gold plated with        Gold plated with

pinhole surface        pinhole surface        pinhole surface


External touchscreen

0.1 °C        0.1 °C        0.1 °C


0.01 °C        0.1 °C        0.1 °C


Yes        Yes        Yes










4-line wired

Temperature sensor        Pt100 1/3DIN,


Pt100 1/3DIN,

4-line wired


Pt100 1/3DIN,

4-line wired





Surface flatness and

base parallelism

< ±10 µm at ≤ 200 °C

< ±15 µm at > 200 °C

< ±10 µm at ≤ 200 °C

< ±15 µm at > 200 °C

< ±10 µm at ≤ 200 °C

< ±15 µm at > 200 °C


Maximum voltage between chuck top and GND

Heating rates

10 kV DC        10 kV DC        10 kV DC




Cooling rates*

Leakage @ 10 V Kelvin Triax (f)

-60°C, -40°C and -10°C        < 30 fA        < 30 fA        < 30 fA

25°C        < 15 fA        < 15 fA        < 15 fA

200°C        < 30 fA        < 30 fA        < 30 fA

300°C        < 50 fA        < 50 fA        < 50 fA


Leakage @ 3000 V Kelvin Triax (f)

-60°C, -40°C and -10°C

< 10 pA

< 10 pA

< 10 pA

25°C

< 5 pA

< 5 pA

< 5 pA

200°C

< 10 pA

< 10 pA

< 10 pA

300°C

< 15 pA

< 15 pA

< 15 pA




Leakage @ 10 kV Coax UHV/SHV (f)

-60°C, -40°C and -10°C

--

--

--

25°C

< 6 nA

< 6 nA

< 6 nA

200°C

< 6 nA

< 6 nA

< 6 nA

300°C

< 6 nA

< 6 nA

< 6 nA





* All data are relevant for chucks in ECO mode.

Thermal Controller Dimensions / Power and Air Consumption


System type

W x D x H (mm)

Weight (kg)

Power cons. (VA)

max. Air flow* (l/min)

20 to 200 °C / 300 °C

300 x 360 x 135

12

700

200


System Controller / Chiller Dimensions and Power / Air Consumption

System type

W x D x H (mm)

Weight (kg)

Power cons. (VA)

max. Air flow*(l/min)

20 to 200 °C / 300 °C

300 x 360 x 140

12

1000

200

-10 to 200 °C / 300 °C

420 x 355 x 450

50

1650

250

-40 to 200 °C / 300 °C

420 x 500 x 1020

140

2400

400

-60 to 200 °C / 300 °C

420 x 500 x 1020

140

2400

400

*All data are relevant for chucks in ECO mode.



img14        img15        img16


ERS High Power Thermal Chuck



SAFETY TEST MANAGEMENT STM™ OPTION

ERS AirCool® (patented) Controller Integrated Chiller -10°C        Chiller -40°C / -60°C




The STM™ system prevents opening of any doors during testing. Accidental opening of any system door during a negative chuck temperature is impossible on any event. Furthermore, an intelligent dew point control routine avoids moisture condensation during cold testing. The system automatically monitors the flow of CDA or Nitrogen. If the flow is interrupted or insufficient, the STM™ automatically turns the chuck into a safe mode by heating up the chuck as fast as possible to 60 °C.







img17img18CONNECTED




TYPICAL TRANSITION TIME




250

AC3 200 mm +20°C to +200°C


350

AC3 200 mm +20°C to +300°C



temperature [°C]

200


150


100


50


300


temperature [°C]

250


200


150


100


50



0

0        5 10 15 20 25 30 35 40 45

time [min]


0

0 5 10 15 20 25 30 35 40 45 50 55 60

time [min]





250


200


temperature [°C]

150


100


50


0


-50


-100

AC3 200 mm -60°C to +200°C



0 5 10 15 20 25 30 35 40 45 50 55 60

time [min]


350

300

temperature [°C]

250

200

150

100

50

0

-50

-100


AC3 200 mm -60°C to +300°C



0 5 10 15 20 25 30 35 40 45 50 55 60

time [min]




img19

These chucks incorporate the ERS patented AC3 cooling technology and its air manage- ment system to purge the MPI ShielDEnvironment™ directly from “already used” air  re- ducing dry air consumption up to 30 to 50% as compared to other systems on the market.

Copyright belongs to ERS electronic GmbH


Thermal Chuck Electrical Supply

Electrical Supply

Compressed Air Supply

Electrical primary connection        100 to 240 VAC auto switch Frequency        50 Hz / 60 Hz


Operating pressure        6.0 bar (0.6 MPa, 87 psi) at specified flow rate

CDA dew point

≤ 0 °C for hot chuck system (ambient to 300 °C)

≤ -45 °C for hot and cold chuck system (-60 °C to 300 °C)

General Probe System

Power        100-240 V AC 50/60 Hz for optical accessories* only

Vacuum        -0.5 bar (for single DUT) / -0.3 bar (for wafers)

Compressed air        6.0 bar

*e.g. microscope illumination, CCD cameras, monitors.


INSTRUMENT CONNECTION PACKAGE

TS2000-HP can be configured with instrument connection package. The packages consists of necessary high

voltage/high current probes and cabling accessories for optimal connection to the test instruments.


Keysight B1505A

Seven MP40 MicroPositioners Two RF probe arms for MP40 Five universal DC adapters Two High-current probes

Three High-voltage (Coax) probe arms

Two High-voltage probe arms with Keysight HV Triax connector

Box of High-current multi-finger probe tips (5 tips)

Box of probe tips needle (25 tips)

High Power connection panel for Dark Box

Three High power chuck connection cables (Keysight Triax, SHV and BNC)

High Power chuck shorting and floating plugs


Keithley 2600-PCT-XB

Five MP40 MicroPositioners Two RF probe arms for MP40 Three universal DC adapters Two High-current probes

Box of High-current multi-finger probe tips (5 tips)

Three High-voltage probe arms with Keithley HV Triax connector

Box of probe tips needle (25 tips)

High Power connection panel for Dark Box

High Power chuck shorting and floating plugs

Three High power chuck connection cables (Keithley Triax, SHV and BNC)


REGULATORY COMPLIANCE

       CE certified. TÜV compliance tested according to EN 61010, ISO 12100, and SEMI S2


       Warranty*: 12 months

       Extended service contract: contact MPI Corporation for more information

*See MPI Corporation‘s Terms and Conditions of Sale for more details.


img20PHYSICAL DIMENSIONS

Station Platform with Bridge and Vibration Isolation Table and Light Curtain*

img21Dimensions (W x D x H)        900 x 1050 x 1930 mm (35.4 x 41.3 x 76.0 in)

Weight        ~500 kg (1102.3 lb.)

img22

*Station accessories, such as different microscopes, cameras, or laser cutters, may change the total height.



img23900


1070





















img24

1100

1090

810

1930

630

1070














img25MPI Global Presence



Direct contact:

Asia region:                ast-asia@mpi-corporation.com EMEA region:        ast-europe@mpi-corporation.com America region: ast-americas@mpi-corporation.com

MPI global presence: for your local support, please find the right contact here:

www.mpi-corporation.com/ast/support/local-support-worldwide

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